Cover image for Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics
Title:
Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics
Author:
Christou, A.
Personal Author:
Publication Information:
Washington : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1978.
Physical Description:
v, 32 pages ; 26 cm.
Language:
English
Format :
Book