Silicon device processing; proceedings.
Title:
Silicon device processing; proceedings.
Author:
Symposium on Silicon Device Processing (1970 : Gaithersburg, Md.)
Conference Author:
Publication Information:
Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1970.
Physical Description:
x, 457 pages : illustrations ; 27 cm.
General Note:
"A United States Department of Commerce publication."
"CODEN: XNBSA."
"Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards."
Language:
English
Subject Term:
Added Author:
Format :
Book