Isolation of components on a silicon wafer using SiO₂
Title:
Isolation of components on a silicon wafer using SiO₂
Author:
Skouson, Glenn W.
Personal Author:
Publication Information:
Washington, D.C. : National Aeronautics and Space Administration, 1966.
Physical Description:
iii, 37 pages : illustrations ; 27 cm.
Language:
English
Subject Term:
Format :
Book