Cover image for An introduction to microelectromechanical systems engineering
Title:
An introduction to microelectromechanical systems engineering
Author:
Maluf, Nadim.
Personal Author:
Publication Information:
Boston : Artech House, [2000]

©2000
Physical Description:
xix, 265 pages : illustrations ; 24 cm.
Language:
English
ISBN:
9780890065815
Format :
Book

Available:*

Library
Call Number
Material Type
Home Location
Status
Central Library TK7875 .M35 2000 Adult Non-Fiction Non-Fiction Area
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Summary

Summary

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.


Table of Contents

MEMS: A Technology from Lilliput
The Sandbox: Materials for MEMS
The Toolbox: Processes for Micromachining
MEM Structure and Systems in Industrial and Automotive Applications
Optical MEM Structures and Systems
MEM Structures and Systems for Medical Applications
MEM Structures and Systems for Electronic Applications
Packaging & Reliability for MEMS
Glossary

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