Cover image for An introduction to microelectromechanical systems engineering
An introduction to microelectromechanical systems engineering
Title:
An introduction to microelectromechanical systems engineering
Author:
Maluf, Nadim.
Personal Author:
Maluf, Nadim.
Publication Information:
Boston : Artech House, [2000]

©2000
Physical Description:
xix, 265 pages : illustrations ; 24 cm.
Series:
Artech House microelectromechanical systems library

Microelectromechanical systems series.
Language:
English
Subject Term:
Microelectromechanical systems.
ISBN:
9780890065815
Format :
Book

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