Cover image for Microlithography : science and technology
Title:
Microlithography : science and technology
Author:
Sheats, James R., 1948-
Publication Information:
New York : Marcel Dekker, [1998]

©1998
Physical Description:
xii, 780 pages : illustrations ; 24 cm
Language:
English
ISBN:
9780824799533
Format :
Book