Cover image for Microlithography : science and technology
Title:
Microlithography : science and technology
Author:
Sheats, James R., 1948-
Publication Information:
New York : Marcel Dekker, [1998]

©1998
Physical Description:
xii, 780 pages : illustrations ; 24 cm
Language:
English
ISBN:
9780824799533
Format :
Book

Available:*

Library
Call Number
Material Type
Home Location
Status
Central Library TK7836 .M525 1998 Adult Non-Fiction Central Closed Stacks-Non circulating
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Summary

Summary

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.


Table of Contents

Exposure Systems
System Overview of Optical Steppers and Scanners
Optical Lithography Modeling
Optics for Photolithography
Krypton Fluoride Excimer Laser for Advanced Microlithography
Alignment and Overlay
Electron Beam Lithography Systems
X-Ray Lithography
Resists and Processing
Chemistry of Photoresist Materials
Resist Processing
Multilayer Resist Technology
Dry Etching of Photoresists
Metrology and Nanolithography
Dimensional Metrology
E-Beam and Proximal Probe

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