Microlithography : science and technology

Title:

Microlithography : science and technology

Author:

Sheats, James R., 1948-

Publication Information:

New York : Marcel Dekker, [1998]

Physical Description:

xii, 780 pages : illustrations ; 24 cm

Language:

English

Subject Term:

Added Author:

ISBN:

9780824799533

Format :

Book

Library	Call Number	Material Type	Home Location	Status	Item Holds
Searching... Central Library	TK7836 .M525 1998	Adult Non-Fiction	Central Closed Stacks-Non circulating	Searching... Unknown	Searching... Unavailable